Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2007-10-16
2007-10-16
Jackson, Jerome (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S414000, C257S432000
Reexamination Certificate
active
10779952
ABSTRACT:
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.
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PCT/US2005/004685 Partial Internation Search Report, 7 pages.
PCT/US2005/004 685 Aug. 29, 2005 Internation Search Report, 8 pages.
PCT/US2005/004 685 Oct. 17, 2005 Written Opinion, 10 pages.
Machine translation of JP 2004-37886 from Japanese patent office.
Advanced NuMicro Systems, Inc.
Hsia David C.
Jackson Jerome
Patent Law Group LLP
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