Acceleration sensor and method of manufacturing the same
Acceleration sensor and method of producing the same
Acceleration sensor using MIS-like transistors
Acoustic charge transport device buffered architecture
Acoustic sensor
Acoustic transducer chip
Actuation using lithium/metal alloys and actuator device
Actuator
Adhesion resistant micromachined structure and coating
Analog interferometric modulator device
Anchors for microelectromechanical systems having an SOI...
Anchors for microelectromechanical systems having an SOI...
Anti-stiction technique for thin film and wafer-bonded...
Apparatus and method for microfabricated multi-dimensional...
Apparatus for driving a load
Apparatus for mounting an absolute pressure sensor
Apparatus having a layer of material configured as a...
Armor coated MEMS devices
Arrangements for and fabrication of mechanical suspension of...
Basic common optical cell configuration of dual cavities for...