Hermetic packaging and method of manufacture and use therefore
Hermetically packaging a microelectromechanical switch and a...
Hermetically sealed silicon micro-machined electromechanical...
HGA dynamics testing with shear mode piezo transducers
High performance MEMS device fabricatable with high yield
High performance MEMS packaging architecture
High temperature circuit structures with thin film layer
High temperature interconnects for high temperature transducers
High temperature resistant solid state pressure sensor
High temperature, pressure and displacement microsensor
High-temperature electrostatic transducers and fabrication...
Hinge for micro-mirror devices
Hinged bonding of micromechanical devices
Hinged bonding of micromechanical devices