Tape carrier, and test apparatus for the same
Temperature stable semiconductor bulk acoustic resonator
Thermally isolated membrane structure
Thin film accelerometer
Thin film piezoelectric element, method of manufacturing the...
Thin film voltage-tuned semiconductor bulk acoustic resonator (S
Thin film-structure and a method for producing the same
Three-dimensional analog input control device
Three-dimensional analog input control device
Three-dimensional structure element and method of...
Torsion spring for MEMS structure
Transducer having a resonating silicon beam and method for formi
Transition metal dielectric alloy materials for MEMS
Trench isolated capacitive micromachined ultrasonic...
Trench isolation for micromechanical devices
Trilayered beam MEMS device and related methods