Overlay mark, method of checking local aligmnent using the...
Overlay vernier key and method for fabricating the same
Pad structure for bonding pad and probe pad and...
Pad structure for bonding pad and probe pad and...
Pattern registration mark designs for use in...
Photo alignment structure
Photomask including auxiliary mark area, semiconductor...
Position check mark
Position detecting method with observation of position detecting
Power GaAs FET having internal matching circuit
Precision aligned and marked structure
Printed circuit boards and method of producing the same
Process independent alignment marks
Process-robust alignment mark structure for semiconductor...
Raised-lines overlay semiconductor targets and method of...
Readable alignment mark structure formed using enhanced chemical
Registration accuracy measurement mark
Registration accuracy measurement mark for semiconductor devices
Registration accuracy measurement mark for semiconductor devices
Registration mark within an overlap of dopant regions