Photo alignment structure

Details Photo alignment structure Photo alignment structure

1997-09-08

1999-03-02

Bowers, Charles

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

438401, 438462, 430644, H01L 2358

Patent

active

058775625

ABSTRACT:
A photo alignment structure integral with a substrate enables the alignment apparatus to receive a reflected light signature of the surface topography of the alignment structure. As the circuit is constructed, the alignment target may be built in tandem with the process. The alignment structure is constructed so that its surface will retain sufficient topography to enable the alignment apparatus to properly align.

REFERENCES:
patent: 5369050 (1994-11-01), Kawai
patent: 5401691 (1995-03-01), Caldwell
patent: 5503962 (1996-04-01), Caldwell
patent: 5578519 (1996-11-01), Cho
patent: 5640053 (1997-06-01), Caldwell
patent: 5643406 (1997-07-01), Shimomura

Affiliated with

Also associated with

Rating

Photo alignment structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photo alignment structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photo alignment structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-425571