Offset alignment marks method and apparatus
On-chip misalignment indication
Optical sensing method to place flip chips
Optical targets
Oriented self-location of microstructures with alignment...
Overlay error reduction by minimization of unpatterned wafer...
Overlay key, method of manufacturing the same and method of...
Overlay mark
Overlay mark
Overlay mark arrangement for reducing overlay shift
Overlay mark for measuring and correcting alignment errors
Overlay mark, method for forming the same and application...
Overlay mark, method of checking local aligmnent using the...
Overlay vernier key and method for fabricating the same