Photomask including auxiliary mark area, semiconductor...

Details Photomask including auxiliary mark area, semiconductor... Photomask including auxiliary mark area, semiconductor...

2005-02-01

2005-02-01

Flynn, Nathan J. (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C257S620000, C257S758000

Reexamination Certificate

active

06849957

ABSTRACT:
A semiconductor device enabling precise and accurate measurement of an inspection mark in a simple manner is obtained. The semiconductor device includes a device forming area and a dicing line area arranged to surround the device forming area on a semiconductor substrate. In the dicing line area, first and second registration marks formed in different shots are provided, and the first and second registration marks include auxiliary marks for identifying the first and second registration marks.

REFERENCES:
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patent: 63-262835 (1988-10-01), None
patent: 9-260446 (1997-10-01), None
patent: 10-22376 (1998-01-01), None

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