Registration accuracy measurement mark for semiconductor devices

Details Registration accuracy measurement mark for semiconductor devices Registration accuracy measurement mark for semiconductor devices

1997-05-05

1999-02-09

Whitehead, Jr., Carl

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

428195, 428209, 428689, H01L 23544, B32B 516

Patent

active

058699066

ABSTRACT:
A registration accuracy measurement mark has a first measurement mark, a second measurement mark, and a third measurement mark arranged in different layers in a layered manner. The first measurement mark includes a first sidewall and a second sidewall in parallel along a Y direction. The second measurement mark includes a third sidewall and a fourth sidewall in parallel along an X direction. The third measurement mark includes a fifth sidewall and a sixth sidewall in parallel along the X direction, and a seventh sidewall and an eighth sidewall in parallel along the Y direction. Registration accuracy measurement in both the X and Y directions can be carried out at the same time even when the measurement of registration accuracy in the X and Y directions respectively is directed to different layers.

REFERENCES:
patent: 5308682 (1994-05-01), Morikawa

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