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ALD method and apparatus

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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ALD method to improve surface coverage

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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ALD method to improve surface coverage

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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ALD of amorphous lanthanide doped TiO x films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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ALD of amorphous lanthanide doped TiO x films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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ALD of metal silicate films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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ALD of tantalum using a hydride reducing agent

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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ALD process for capacitor dielectric

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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ALD processing techniques for forming non-volatile...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
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ALD ZnO seed layer for deposition of ZnO nanostructures on a...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
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Aligned dummy metal fill and hole shapes

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Aligning method, exposure apparatus using this aligning...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Alignment and orientation features for a semiconductor package

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Alignment and orientation features for a semiconductor package

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Alignment check method on printed circuit board

Semiconductor device manufacturing: process – With measuring or testing
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Alignment dip back oxide and code implant through poly to...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Alignment feature that avoids comet tail formation in spin-on ma

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Alignment key, method for fabricating the alignment key, and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Alignment mark and alignment method for the fabrication of...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Alignment mark and alignment method for the fabrication of...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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