Vacuum-cavity MEMS resonator
Vanishingly small integrated circuit diode
Vapochromic LED
Vapor delivery system for solid precursors and method of...
Vapor deposition method and vapor deposition apparatus for...
Vapor deposition of benzotriazole (BTA) for protecting...
Vapor deposition of tungsten materials
Vapor deposition processes for tantalum carbide nitride...
Vapor deposition routes to nanoporous silica
Vapor phase cleaning of alkali and alkaline earth metals
Vapor phase etch trim structure with top etch blocking layer
Vapor phase etching MEMS devices
Vapor phase etching of oxide masked by resist or masking materia
Vapor phase growth apparatus
Vapor phase growth method
Vapor phase growth method by controlling the heat output in...
Vapor phase growth of a dielectric film and a fabrication proces
Vapor phase repair and pore sealing of low-K dielectric...
Vapor treatment for repairing damage of low-k dielectric
Vapor-deposited porous films for energy conversion