Vapor deposition of benzotriazole (BTA) for protecting...

Details Vapor deposition of benzotriazole (BTA) for protecting... Vapor deposition of benzotriazole (BTA) for protecting...

2006-12-05

2006-12-05

Quach, T. N. (Department: 2826)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S622000, C438S687000

Reexamination Certificate

active

07144802

ABSTRACT:
A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure having an interconnect, and depositing vaporized benzotriazole on the interconnect.

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