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Ultra-shallow junction formation by novel process sequence...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-shallow junction formation for deep sub-micron...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-shallow p-type junction having reduced sheet resistance an

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-shallow semiconductor junction formation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-short channel recessed gate MOSFET with a buried contact

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-short transistor fabrication scheme for enhanced reliabili

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-thick metal-copper dual damascene process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Ultra-thin body SOI MOSFET and gate-last fabrication method

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-thin channel device with raised source and drain and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-thin chip packaging

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
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Ultra-thin fully depleted SOI device and method of fabrication

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-thin gate dielectrics

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-thin gate oxide formation using an N2O plasma

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Ultra-thin gate oxide through post decoupled plasma...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Ultra-thin high-quality germanium on silicon by...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with subsequent...
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Ultra-thin logic and backgated ultra-thin SRAM

Semiconductor device manufacturing: process – Making conductivity modulation device
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Ultra-thin resist and barrier metal/oxide hard mask for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Ultra-thin resist and nitride/oxide hard mask for metal etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Ultra-thin resist and silicon/oxide hard mask for metal etch

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Ultra-thin resist coating quality by increasing surface...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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