Ultra-shallow junction formation by novel process sequence...
Ultra-shallow junction formation for deep sub-micron...
Ultra-shallow p-type junction having reduced sheet resistance an
Ultra-shallow semiconductor junction formation
Ultra-short channel recessed gate MOSFET with a buried contact
Ultra-short transistor fabrication scheme for enhanced reliabili
Ultra-thick metal-copper dual damascene process
Ultra-thin body SOI MOSFET and gate-last fabrication method
Ultra-thin channel device with raised source and drain and...
Ultra-thin chip packaging
Ultra-thin fully depleted SOI device and method of fabrication
Ultra-thin gate dielectrics
Ultra-thin gate oxide formation using an N2O plasma
Ultra-thin gate oxide through post decoupled plasma...
Ultra-thin high-quality germanium on silicon by...
Ultra-thin logic and backgated ultra-thin SRAM
Ultra-thin resist and barrier metal/oxide hard mask for...
Ultra-thin resist and nitride/oxide hard mask for metal etch
Ultra-thin resist and silicon/oxide hard mask for metal etch
Ultra-thin resist coating quality by increasing surface...