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Test structure and methodology for semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Test structure and methodology for semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Test structure for characterizing junction leakage current

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Test structure for detecting bridging of DRAM capacitors

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Test structure for determining a short circuit between...

Semiconductor device manufacturing: process – With measuring or testing
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Test structure for differentiating the line and via...

Semiconductor device manufacturing: process – With measuring or testing
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Test structure for high precision analysis of a semiconductor

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Test structure for monitoring overetching of silicide during con

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Electrical characteristic sensed
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Test structure for providing depth of polish feedback

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Test structure formation in semiconductor processing

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Test structure used to measure metal bottom coverage in trenches

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Electrical characteristic sensed
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Test structures and methods

Semiconductor device manufacturing: process – With measuring or testing
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Test structures and methods for inspection of semiconductor...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Test structures for electrical linewidth measurement and...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Test structures for silicon etching

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Test structures for testing planarization systems and...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Test structures in unused areas of semiconductor integrated...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Test structures to define COP electrical effects

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Test system for ferroelectric materials and noble metal...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Test wafer and method for investigating electrostatic...

Semiconductor device manufacturing: process – With measuring or testing
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