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Self-aligned shallow trench isolation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned shallow trench isolation process having...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned SiGe HBT BiCMOS on SOI substrate and method of...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – On insulating substrate or layer
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Self-aligned silicidation of TFT source-drain region

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Self-aligned silicidation structure and method of formation ther

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned silicidation technique to independently form silici

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned silicide (salicide) process for electrostatic disch

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned silicide (salicide) process for low resistivity...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned silicide (salicide) process for strained...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned silicide gate technology for advanced submicron MOS

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Self-aligned silicide manufacturing method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned silicide process

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Self-aligned silicide process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned silicide process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned silicide process for forming silicide layer...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned silicide process for reduction of Si...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned silicide process for silicon sidewall source...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned silicide process utilizing ion implants for...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned silicide strap connection of polysilicon layers

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned silicide strap connection of polysilicon layers

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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