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Removal of silicon oxycarbide from substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Removal of silicon oxynitride material using a wet chemical...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Removal of silicon oxynitride on a capacitor electrode for...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Removal of SiON ARC film after poly photo and etch

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Removal of SiON residue after CMP

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Removal of SOG etchback residue by argon treatment

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Removal of surface contaminants by irradiation using various met

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Patent

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Removal of surface dopants from a substrate

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Removal of transition metal ternary and/or quaternary...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Removal of wafer edge defocus due to CMP

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Removal rate behavior of spin-on dielectrics with chemical mecha

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Patent

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Removing a crystallization catalyst from a semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Removing a high-k gate dielectric

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Removing inherent stress via high temperature annealing

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Insulative housing or support
Reexamination Certificate

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Removing sacrificial material by thermal decomposition

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Removing silicon oxynitride of polysilicon gates in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Removing solder from integrated circuits for failure analysis

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Patent

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Removing solution, cleaning method for semiconductor...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Removing undesirable nanotubes during nanotube device...

Semiconductor device manufacturing: process – Having organic semiconductive component
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Removing whisker defects

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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