Deposition of nano-crystal silicon using a single wafer chamber
Deposition of nanoporous silic films using a closed cup coater
Deposition of nanoporous silica films using a closed cup coater
Deposition of passivation layers for active matrix liquid...
Deposition of permanent polymer structures for OLED fabrication
Deposition of phosphosilicate glass film
Deposition of polycrystal Si film
Deposition of semiconductor layer by plasma process
Deposition of silicon dioxide and silicon oxynitride using bis(t
Deposition of silicon germanium on silicon-on-insulator...
Deposition of silicon layers for active matrix liquid...
Deposition of silicon-containing films from hexachlorodisilane
Deposition of stable dielectric films
Deposition of super thin PECVD SiO.sub.2 in multiple deposition
Deposition of tensile and compressive stressed materials
Deposition of titanium amides
Deposition of titanium nitride films having improved uniformity
Deposition of titanium oxide film containing droping element...
Deposition of transition metal carbides
Deposition of tungsten films from W(CO)6