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Atomic layer deposition of hafnium lanthanum oxides

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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Atomic layer deposition of interpoly oxides in a...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition of Zr 3 N 4 /ZrO 2 films as gate...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition of Zr x Hf y Sn 1-x-y O 2 films...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition of Zr x Hf y Sn 1-x-y O 2 films...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition processes for non-volatile memory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition processes for non-volatile memory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer-deposited LaAlO3 films for gate dielectrics

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Avoiding abnormal capacitor formation by an offline edge-bead ri

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Avoiding field oxide gouging in shallow trench isolation...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Avoiding plasma charging in integrated circuits

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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