Self-aligned stacked gate etch process for fabricating a two-tra
Self-aligned STI process using nitride hard mask
Self-aligned STI SONOS
Self-aligned storage node definition in a DRAM that exceeds the
Self-aligned structure and method for confining a melting...
Self-aligned transistor and diode topologies in silicon...
Self-aligned trench capacitor capping process for high...
Self-aligned trench field effect transistors with regrown...
Self-aligned trench field effect transistors with regrown...
Self-aligned trench MOSFET structure and method of manufacture
Self-aligned trench MOSFETs and methods for making the same
Self-aligned trench transistor using etched contact
Self-aligned trenched-channel lateral-current-flow transistor
Self-aligned twin well process
Self-aligned twin well process
Self-aligned, programmable phase change memory
Self-aligned, silicided, trench-based, DRAM/EDRAM processes...
Self-aligning photolithography and method of fabricating...
Self-amorphized regions for transistors
Self-limited metal recess for deep trench metal fill