Dopant activation anneal to achieve less dopant diffusion...
Doping in crystalline diamond substrates
Doping method and method of manufacturing field effect...
DRAM having improved leakage performance and method for...
Edge intensive antifuse
Electrically erasable programmable read only memory (EEPROM)...
Electrostatic discharge protection device having a graded...
Elimination of n+ contact implant from flash...
End of range (EOR) secondary defect engineering using...
End-of-range damage suppression for ultra-shallow junction forma
Enlarged align tolerance in buried contact process using sidewal
Epitaxial delta doping for retrograde channel profile
ESD implantation method in deep-submicron CMOS technology...
Expanded implantation of contact holes
Fabrication method for semiconductor device
Fabrication method for semiconductor device and...
Fabrication method of nanocrystals using a focused-ion beam
Fabrication of a SiC semiconductor device comprising a pn juncti
Fabrication of semiconductor gettering structures by ion implant
Fabrication system and method having inter-apparatus transporter