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PAA-based etchant, methods of using same, and resultant...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Patterned recess formation using acid diffusion

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Personalized hardware

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Photovoltaic structure with a conductive nanowire array...

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Plasma control using dual cathode frequency mixing and...

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Plasma emission detection during lateral processing of...

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Plasma etch method for forming patterned layer with enhanced...

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Plasma etch resistant coating and process

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Plasma etching method and plasma etching apparatus

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Plasma ignition and complete faraday shielding of capacitive...

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Plasma processing method and apparatus

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Plasma processing method and plasma processing apparatus for...

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Plasma processing method using spectroscopic processing unit

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Plasma reactor control by translating desired values of M...

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Poly gate silicide inspection by back end etching and by...

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Process control via valve position and rate of position...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Process for detecting agglomerated intrinsic point defects...

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Process for device fabrication in which the plasma etch is contr

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Process for locating, displaying, analyzing, and optionally...

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Process for locating, displaying, analyzing, and optionally...

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