LOCOS field oxide and field oxide process using silicon nitride
Locos isolation process using a layered pad nitride and dry fiel
Locos method with double polysilicon/silicon nitride spacer
Locos with bird's beak suppression by a nitrogen implantation
Locus isolation technique using high pressure oxidation (hipox)
Method and structure for isolating integrated circuit...
Method for controlling the silicon nitride profile during patter
Method for differential trenching in conjunction with...
Method for electrochemical local oxidation of silicon
Method for electrochemical oxidation of silicon
Method for fabricating a high-bias device
Method for fabricating a trench isolation structure having a...
Method for fabricating a trench isolation structure having a...
Method for fabricating different gate oxide thicknesses...
Method for fabricating field oxide
Method for fabricating field oxide isolation region for semicond
Method for fabricating isolation layer in semiconductor device
Method for fabricating isolation layer of semiconductor device
Method for fabricating shallow trenches
Method for fabricating trench isolation