Gap-filling of O.sub.3 -TEOS for shallow trench isolation
Gapfill and planarization process for shallow trench isolation
Generation of a loose planarization mask having relaxed boundary
HDP gap-filling process for structures with extra step at...
High aspect ratio high density plasma (HDP) oxide gapfill...
High aspect ratio trench isolation process for surface...
High density isolation using an implant as a polish stop
High density trench fill due to new spacer fill method...
High performance strained CMOS devices
High quality isolation for high density and high performance int
High throughput chemical vapor deposition process capable of fil
Hybrid trench isolation technology for high voltage...
Identifying yield-relevant process parameters in integrated...
Impurity ion segregation precluding layer, fabrication...
In-situ liner for isolation trench side walls and method
Insulating micro-structure and method of manufacturing same
Integrated circuit and method including an isolation...
Integrated circuit devices including shallow trench isolation
Integrated circuit formed with shallow isolation structures havi
Integrated circuit insulator and method