Integrated circuit and method including an isolation...

Details Integrated circuit and method including an isolation... Integrated circuit and method including an isolation...

2011-08-23

2011-08-23

Wilson, Allan R (Department: 2815)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Grooved and refilled with deposited dielectric material

C257S510000, C257SE21546

Reexamination Certificate

active

08003490

ABSTRACT:
An integrated circuit and method including an isolation arrangement. One embodiment provides a substrate having trenches and mesa regions and also auxiliary structures on the mesa regions. A first isolation structure covers side walls and a bottom region of the trenches and at least partially side walls of the auxiliary structure. A liner on the first isolation structure fills the trenches and gaps between the auxiliary structures with a second isolation structure; and the second isolation structure is pulled back, wherein upper sections of the liner are uncovered.

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