Impurity control in HDP-CVD DEP/ETCH/DEP processes
In situ deposition of a nitride layer and of an...
In-line system having overlay accuracy measurement function...
In-situ deposition of stop layer and dielectric layer during for
In-situ formation of metal oxide and ferroelectric oxide films
In-situ generation of p-xylyiene from liquid precursors
In-situ silicon nitride and silicon based oxide deposition...
In-situ SiON deposition/bake/TEOS deposition process for reducti
In-situ use of dichloroethene and NH3 in an H2O steam based...
In-situ-etch-assisted HDP deposition
In-situ-etch-assisted HDP deposition using SiF4 and hydrogen
Increasing carrier mobility in NFET and PFET transistors on...
Indium oxide conductive film
Inductively coupled plasma CVD
Infra-red light-emitting device and method for preparing the...
Insulating and capping structure with preservation of the...
Insulating film and method of producing semiconductor device
Insulating film and method of producing semiconductor device
Insulating film formation method, semiconductor device, and...
Insulating film of semiconductor device and coating solution...