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Method for the generation of variable pitch nested lines...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for the manufacture of phase shifting masks for EUV...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for the preparation of mask for X-ray lithography

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for the production of a self-supporting mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for the repair of defects in lithographic masks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for the repair of defects in photolithographic masks...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for the repair of lithographic masks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for transferring patterns with charged particle beam

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for tuning an attenuating phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for using a laser ablative recording element with low red

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for using phase-shifting mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of a floating pattern loading system in mask...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of and system for improving stability of photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of automatically forming a rim phase shifting mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of blind border pattern layout for attenuated phase shift

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of blind border pattern layout for attenuated phase shift

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of calibration of a lithographic apparatus, mask for...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of characterizing partial coherent light illumination...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of chromeless phase shift mask fabrication suitable for a

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of coil fabrication for thin-film magnetic recording head

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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