Method for the production of a self-supporting mask

Details Method for the production of a self-supporting mask Method for the production of a self-supporting mask

1982-09-22

1985-02-05

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430296, 430323, 430324, 427438, 156643, 204 11, G03F 900

Patent

active

044978847

ABSTRACT:
The invention relates to a method for the production of a self-supporting spacing mask for a particle radiation-projection system, especially for the selective structuring and/or doping when producing highly integrated circuits.
According to the invention, layers of varying compositions are deposited onto a substrate, structured and then partially or completely removed, until the mask structure which is backed by a stable metal grid is produced on the substrate, whereby a special pattern, made like a nuclear filter with statistically distributed pores is used for grid formation.

REFERENCES:
patent: 4058432 (1977-11-01), Schuster-Woldan et al.

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