Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1994-11-14
1996-04-30
Duda, Kathleen
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430311, 430313, 430317, 430318, 430319, 430320, G03F 700
Patent
active
055123945
ABSTRACT:
A method for fabricating a thin-film magnetic read/write head that eliminates contrast effects producing notching in a thin-film magnetic head coil caused by subsurface reflectivity at a reflective layer step during a photolithography step in the fabrication of the coil is provided. The method comprises the steps of forming a first permalloy yoke on a substrate, wherein the edges of the first yoke create steps from the top of the first yoke down to the substrate, forming a partial conformal layer of an electric insulation material over the first permalloy yoke and the substrate, forming a conformal copper seed layer over the electric insulation layer, forming a conductive coil on the electric insulation layer, wherein the copper coil is fabricated using a lithography process including placing a phase-shifting mask, formed in the image of the coil and containing non-printable openings covered by transparent material of a thickness that creates a 180.degree. phase-shift in illumination, over a photoresist layer, the phase-shifting mask creating illumination destructive interference in regions of the photoresist that are covered by the mask layer and immediately adjacent to regions of the photoresist not covered by the mask, forming a second electric insulation layer over the conductive coil, wherein the second electric insulation layer planarizes the coil topography, and forming a second permalloy yoke over the second electric insulation layer, wherein the second yoke is joined to the first yoke at a back gap but separated from the first yoke by a thin insulating layer at a recording gap.
REFERENCES:
patent: 5045417 (1991-09-01), Okamoto
patent: 5126220 (1992-06-01), Tokitomo et al.
patent: 5153083 (1992-10-01), Garofalo et al.
Marc D. Levenson et al., The Phase-Shifting Mask II: Imaging simulations and Submicrometer Resist Exposures, IEEE Transactions On Electron Devices, vol. ED-31, No. 6, Jun. 1984, pp. 753-763.
Levenson Marc D.
Santini Hugo A. E.
Dillon Andrew J.
Duda Kathleen
International Business Machines - Corporation
Murray Leslie G.
Yudell Craig J.
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