Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2005-06-07
2005-06-07
Rosasco, S. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S394000
Reexamination Certificate
active
06902851
ABSTRACT:
A phase-shifting mask for a photolithographic process includes a transparent material having first and second trenches. The first trench has a first depth and the second trench has a second depth deeper than the first depth. The phase-shifting mask is suitable for testing the effect of lights of two wavelengths on a layer of photoresist.
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Babcock Carl P.
Ghandehari Kouros
Advanced Micro Devices , Inc.
Rosasco S.
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