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Method for designing photolithographic reticle layout,...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for designing reticle, reticle, and method for manufactur

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for detecting failure of database patterns of photo mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for detecting failure of database patterns of photo mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for detecting phase error of a phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for determining an optimal absorber stack geometry of...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for determining and correcting reticle variations

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for determining phase variance and shifter stability of p

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for dry etching photomask material

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for dust-proofing in the manufacture of electronic device

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for eliminating final euv mask repairs in the reflector r

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for etching a quartz layer in a photoresistless...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for etching an anti-reflective coating

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for etching using a multi-layer mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for evaluating photo mask and method for...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for exposing a photosensitive resist layer with...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for fabricating a half-tone type phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for fabricating a light exposure mask comprising the use

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for fabricating a lithographic reflection mask in...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for fabricating a mask configuration

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