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Asymmetric halftone biasing for sub-grid pattern adjustment

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Asymmetrical resist sidewall

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Atom lithographic mask having diffraction grating aligned with p

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Atom lithographic mask having diffraction grating and attenuated

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Attenuated embedded phase shift photomask blanks

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Attenuated embedded phase shift photomask blanks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated embedded phase shift photomask blanks

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Attenuated embedded phase shift photomask blanks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated embedded phase shift photomask blanks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated phase shift mask and a method for making the mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated phase shift mask and method of manufacture thereof

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated phase shift mask comprising phase shifting layer with

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Attenuated phase shift mask for extreme ultraviolet...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated phase shift mask for use in EUV lithography and a...

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Attenuated phase shift mask with halftone boundary regions

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Attenuated phase shifting mask with buried absorbers

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Attenuated phase-shift mask and method of manufacturing the...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Attenuated rim phase shift mask

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Attenuating embedded phase shift photomask blanks

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