System and method for processing masks with oblique features
System and method for providing phase shift mask passivation...
System and method for verifying and controlling the...
System and method of providing optical proximity correction...
System and method of smoothing mask shapes for improved...
System for coloring a partially colored design in an...
System for coloring a partially colored design in an...
System for design and production of integrated circuit photomask
System for providing photomask alignment keys in semiconductor i
System for specifying critical dimensions, sequence numbers and
Systematic method for production of phase-shifting photolithogra
Systems and methods for implementing and manufacturing...
Systems and methods for modifying a reticle's optical...
Tapered ion implantation with femtosecond laser ablation to...
Technique for fabricating phase shift masks using self-aligned s
Technique for preparing a photo-mask for imaging three-dimension
Technique of exposing a resist using electron beams having...
Techniques to characterize iso-dense effects for microdevice...
Template mask lithography utilizing structured beam
Test mask for determining alignment of an automatic IC mask test