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Sandwich photoresist structure in photolithographic process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Sandwiched middle antireflection coating (SMARC) process

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Selective and precise etching and plating of conductive substrat

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Selective electroplating method employing annular edge ring...

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Selective metal etching of two gold alloys on common surface for

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Selective metallization process

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Selective metallization process

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Selective metallization process and additive method for manufact

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Selective photoresist hardening to facilitate lateral trimming

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Selective removal of coating material on a coated substrate

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Selective sizing of features to compensate for resist...

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Selective surface exposure, cleans, and conditioning of the...

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Self-aligned conductive line for cross-point magnetic memory...

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Self-aligned metal-insulator-metal capacitor for integrated...

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Self-aligned nonnested sloped via

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Self-aligned pattern formation using wavelenghts

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Self-aligned pattern over a reflective layer

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Self-aligned tungsten-filled via process and via formed thereby

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Self-aligned, high resolution resonant dielectric lithography

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Self-aligning contacts for stacked electronics

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