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Ultra-fine microfabrication method using a fast atomic energy be

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Ultra-thin resist and oxide/nitride hard mask for metal etch

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Ultra-thin resist and SiON/oxide hard mask for metal etch

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Ultraviolet curing of photosensitive polyimides

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Underlayer compositions for multilayer lithographic processes

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Upside down bake plate to make vertical and negative...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Use of base developers as immersion lithography fluid

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Use of chromeless phase shift features to pattern large area...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Use of DARC and BARC in flash memory processing

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Use of dual mask processing of different composition such as...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Use of mixed bases to enhance patterned resist profiles on...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Use of pedestals to fabricate contact openings

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Use of perfluoro-n-alkanes in vacuum ultraviolet applications

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Use of surface coupling agent to improve adhesion

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UV absorbing glass cloth and use thereof

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UV-curable compositions and method of use thereof in...

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UV-enhanced silylation process to increase etch resistance...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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