Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1987-07-31
1989-06-27
Dees, Jose G.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430317, 430318, 430330, 437175, 437228, 437229, G03C 500
Patent
active
048429910
ABSTRACT:
A via (64, 66, 68) comprises a conductor (45, 46, 48) having a first surface (58, 60, 62) and at least one second surface (49) that forms at least one edge (52) with the first surface (58, 60, 62). A first insulator layer (33) is formed on the first surface and defines a first area (58, 60, 62) on the conductor that is not covered by the first insulator layer (33). A second insulator layer (70) is formed over the second surface (49). The first and second insulator layers (33, 70) define a via (64, 66 and 68) to the conductor (45, 46, 48) . The bottom area (58, 60, 62) of the via (64, 66, 68) is equal to the first area and is bounded in part by the edge (52).
REFERENCES:
patent: 4614021 (1986-09-01), Hulseweh
patent: 4764484 (1988-08-01), Mo
patent: 4789648 (1988-12-01), Chow et al.
Dees Jos,e G.
Heiting Leo N.
Melton Michael E.
Sharp Melvin
Texas Instruments Incorporated
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