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Device for the insolation of micrometric and/or submicrometric a

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Device manufacturing method

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Dielectric composition

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Dielectric layered sequentially processed circuit board

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Dielectric line and production method therefor

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Diffusion plate and method for manufacturing master die thereof

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Dipole illumination

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Direct incident beam lithography for patterning...

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Dislocation free local oxidation of silicon with suppression of

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Double patterning method

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Double patterning with a double layer cap on carbonaceous...

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Doubled-sided wafer scrubbing for improved photolithography

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Dry developable resist etch chemistry

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Dry development process for a bi-layer resist system

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Dry microlithography process

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Dry process for stripping photoresist from a polyimide surface

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Dual damascene process

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Dual damascene process

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Dual damascene process having tapered vias

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Dual damascene process using a single photo mask

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