Device for the insolation of micrometric and/or submicrometric a

Details Device for the insolation of micrometric and/or submicrometric a Device for the insolation of micrometric and/or submicrometric a

1996-08-14

1997-12-23

Gorgos, Kathryn L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430327, 430331, 313309, G03C 500

Patent

active

057006270

ABSTRACT:
A device for insolating micrometric areas in a photosensitive layer and a method for producing patterns in such a layer.
The method is characterized in that the layer is subjected to an atmosphere containing a transparent liquid that does not wet the photosensitive material, in order to produce on this layer a monolayer of micro-droplets (121), the layer of photosensitive material is insolated through the monolayer of micro-droplets (121) in order to selectively print the areas of exposure (122) of the layer, the micro-droplets (121) are removed, and the layer of photosensitive material is developed in order to form said patterns in accordance with the areas of exposure.

REFERENCES:
patent: 4857161 (1989-08-01), Borel et al.
Patent Abstracts of Japan, No. JP 57181549, vol. 7, No. 030 (P-173), Feb. 5, 1983.
Patent Abstracts of Japan, No. JP 58004148, vol. 7, No. 075 (P-187), Mar. 29, 1983.
La pulverisation par ultra-sons appliquee a la spectrometrie d'absorption atomique, by J. Spitz and G. Uny, Applied Optics, vol. 7, No. 7, Jul. 1968.
Chemical Vapor Deposition at Low Temperatures, by J. C. Viguie and J. Spitz, vol. 122, No. 4, Apr. 1975, pp. 585-588.
Chemical Abstract 1997: 175,368 no month available.
Chemical Abstract 1996: 302,465 no month available.

Affiliated with

Also associated with

Rating

Device for the insolation of micrometric and/or submicrometric a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device for the insolation of micrometric and/or submicrometric a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for the insolation of micrometric and/or submicrometric a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1801638