Resist material and fabrication method thereof

Resist material and method for forming a resist pattern with...

Resist material and pattern formation process

Resist material comprising polymer of allylsilyl compound and pa

Resist material for use in thick film resists

Resist material with carbazole diazonium salt acid generator and

RF plasma treated photosensitive lithographic printing plates

Ring-opened polynorbornene negative photoresist with bisazide

Selected acid generating agents and their use in processes...

Selected block copolymer novolak binder resins in radiation-sens

Selected block phenolic oligomers and their use in radiation-sen

Selected high thermal novolaks and positive-working radiation-se

Selected o-quinonediazide sulfonic acid esters of phenolic compo

Selected photoactive methylolated cyclohexanol compounds and the

Selected trihydroxybenzophenone compounds and their use in photo

Self-developing radiation sensitive resist with amorphous polyme

Sesamol/aldehyde condensation products as sensitivity enhancers

Silicon containing negative resist for DUV, I-line or E-beam lit

Silicon-containing novolak resin and resist material and pattern

Silicon-containing positive resist and use in multilayer metal s