Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1990-07-02
1992-09-29
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430165, 430193, 430326, 534556, 534557, G03F 7022, G03F 7023, G03F 732, C07C24500
Patent
active
051513404
ABSTRACT:
A photoactive compound having formula (I): ##STR1## wherein R is selected from the group consisting of hydrogen or a lower alkyl group having 1-4 carbon atoms and each D is individually selected from the group consisting of a hydrogen or photoactive o-quinonediazide sulfonyl group; subject to the proviso that at least two of the four D's in formula (I) are photoactive o-naphthoquinonediazide sulfonyl moieties.
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Organic Synthesis, vol. 4, p. 907.
Bowers Jr. Charles L.
Chu John S. Y.
OCG Microelectronic Materials Inc.
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