Apparatus for generating a plurality of beamlets

Apparatus for generating a plurality of beamlets

Apparatus for improved image resolution in electron microscopy

Apparatus for injecting plasma gas in atmosphere

Apparatus for irradiating material by an electron beam

Apparatus for irradiation with charged particle beams

Apparatus for keying in electron beams

Apparatus for magnetically scanning and/or switching a...

Apparatus for measuring plasma characteristics within a semicond

Apparatus for modulating a particle beam intensity

Apparatus for monitoring ion beams with an electrically isolated

Apparatus wherein ionizing radiation is generated

Apparatus with permanent magnetic lenses

Application accelerator system having bunch control

Arrangement and process for adjusting imaging systems

Arrangement for detecting secondary and/or backscatter electrons

Arrangement for masked beam lithography by means of electrically

Arrangement for preventing the alteration of the primary beam by

Arrangement for shadow-casting lithography

Astigmatism in electron beam probe instruments