Apparatus for improved image resolution in electron microscopy

Details Apparatus for improved image resolution in electron microscopy Apparatus for improved image resolution in electron microscopy

1994-07-25

1996-05-14

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

250311, H01J 37244

Patent

active

055170331

ABSTRACT:
An apparatus for improving the resolution of images produced by an electron microscope is provided and includes an electron beam forming an electron image, a support structure mounted in the path of the electron beam, with the support structure transmitting the electron image. Scintillating material is coated onto the side of the support structure opposite that on which the electron image is incident, the scintillating material converting the electron image into a light image. A mirror is provided for deflecting the optical path of the light image into a CCD camera positioned to receive and record the light image.

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patent: 4810886 (1989-03-01), Mori et al.
patent: 5013915 (1991-05-01), Isakozawa et al.
patent: 5065029 (1991-11-01), Krivanek
patent: 5401964 (1995-03-01), Mancuso
R. Valle et al., "Scattering and Back-Scattering of 1 MeV Electorns", Ultramicroscopy 27 (1989) pp. 67-78.
James B. Pawley, "An HVEM Image Intensifier Using a Mini-Lens to Optimize its Spatial Resolution," Thirty-Seventh Annual EMSA Meeting, pp. 592-593 (1979).
James Pawley, "Recent Improvements to the EM-7 at the Madison Biotechnology Resource", Thirty-Eighth Annual EMSA Meeting, pp. 8-11 (1980).

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