Apparatus for irradiation with charged particle beams

Details Apparatus for irradiation with charged particle beams Apparatus for irradiation with charged particle beams

1982-12-28

1984-10-23

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

With target means

250310, 250311, H01J 314, G01N 2304, G01N 23225

Patent

active

044790600

ABSTRACT:
An apparatus according to the present invention for irradiating a specimen with charged particle beams comprises a single charged particle generating source from which the charged particle beams formed of electrons and negative ions, respectively, can be simultaneously derived; a specimen holder on which the specimen is placed; and charged particle irradiation means which is interposed between the charged particle generating source and the specimen holder in order to focus the charged particle beams and to irradiate the surface of the specimen with the focused beams, and which includes at least one magnetic lens and at least one electrostatic lens that are individually disposed.

REFERENCES:
patent: 2356633 (1944-08-01), Von Ardenne
patent: 3617739 (1971-11-01), Liebl
patent: 4233509 (1980-11-01), Tamura et al.

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