Charged particle-optical systems, methods and components

Charged particles exposure apparatus having an optically deforma

Charged-particle beam apparatus

Charged-particle beam apparatus equipped with aberration...

Charged-particle beam apparatus equipped with aberration...

Charged-particle beam exposure device incorporating beam splitti

Charged-particle beam instrument and method of correcting...

Charged-particle beam lithography apparatus and device...

Charged-particle beam system

Charged-particle beam system

Charged-particle beam system

Charged-particle detectors and mass spectrometers employing the

Charged-particle exposure apparatus

Charged-particle optical system

Charged-particle-beam microlithography apparatus and methods...

Charged-particle-beam optical system

Charged-particle-beam projection apparatus and transfer methods

Charged-particle-beam projection optical system

Charged-particle-beam projection-lens system exhibiting...

Chromatic aberration corrector for charged particles and...