Charged-particle beam system

Details Charged-particle beam system Charged-particle beam system

2007-10-18

2009-10-06

Nguyen, Kiet T (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

Reexamination Certificate

active

07598496

ABSTRACT:
An aberration for correcting higher-order aberrations with a relatively small number of components is by let N1 being the aberration order at a first location, S1 being the symmetry at the first location, N2 being the aberration order at a second location and S2 being the symmetry at the second location. The produced combination aberration satisfies the following condition set1as order=N1+N2−1 and symmetry=|S1+S2| or |S2−S1|. That is two aberration-correcting elements (aberration-introducing elements) corresponding to the first and second locations, respectively. An aberration satisfying the condition set1is corrected by making use of the produced combination aberration.

REFERENCES:
patent: 6646267 (2003-11-01), Haider et al.
patent: 6930312 (2005-08-01), Matsuya et al.
patent: 2001-516139 (2001-09-01), None
Vernon D. Beck, “A Hexapole Spherical Aberration Corrector,” Optik 53, No. 4, pp. 241-255 (1979).
A.V. Crewe and D. Kopf, “A Sextupole System for the Correction of Spherical Aberration,” Optik 55, No. 1, pp. 1-10 (1980).

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