Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-02-08
2005-02-08
Berman, Jack (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML
Reexamination Certificate
active
06852983
ABSTRACT:
Particle-beam apparatus is realized which is equipped with an aberration corrector capable of controlling the angular aperture of a particle beam after performing aberration correction. The corrector comprises four stages of electrostatic quadrupole elements, two stages of magnetic quadrupole elements for superimposing a magnetic potential distribution analogous to the electric potential distribution created by the two central stages of the electrostatic quadrupole elements, and four stages of electrostatic octupole elements for superimposing an octupole electric potential on the electric potential distribution created by the four stages of electrostatic quadrupole elements. An objective lens is located downstream of the corrector. An objective aperture is located upstream of the corrector. An angular aperture control lens is located downstream of the objective aperture to control the angular aperture of the probe hitting a specimen surface.
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Kazumori Hiroyoshi
Matsuya Miyuki
Berman Jack
Fernandez Kalimah
JEOL Ltd.
Webb Ziesenheim & Logsdon Orkin & Hanson, P.C.
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