Chromatic aberration corrector for charged particles and...

Details Chromatic aberration corrector for charged particles and... Chromatic aberration corrector for charged particles and...

2007-05-01

2007-05-01

Mack, Ricky (Department: 2873)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000

Reexamination Certificate

active

10990498

ABSTRACT:
The present invention provides an aberration corrector functioning under a condition outside the setting optical condition of an incorporated charged particle beam apparatus.An intermediate potential region different from the ground potential of an aberration corrector is provided in the space between the stages of multipole lenses constructing the aberration corrector to adjust a potential. Using this, when selecting an incident (outgoing) condition, an outgoing (incident) condition can be adjusted.

REFERENCES:
patent: 4963748 (1990-10-01), Szilagyi
patent: 6924488 (2005-08-01), Matsuya et al.
patent: 6982427 (2006-01-01), Kawasaki et al.
Zach, J., et al. “Aberration Correction in a Low Voltage SEM by a Multipole Corrector,” Nucl. Inst. and Methods in Phys., Res., A vol. 363 (1995), p. 316-325.

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