Charged-particle-beam optical system

Details Charged-particle-beam optical system Charged-particle-beam optical system

1998-03-27

2000-04-11

Westin, Edward P.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, H01J 37153, H01J 320, G21K 108

Patent

active

060490845

ABSTRACT:
Charged-particle-beam optical systems are disclosed exhibiting reduced aberrations. Such a system comprises a symmetric magnetic doublet type projection lens system and deflectors. An imaginary Z-axis is superimposed on the optical axis with an origin at an image-crossover point. Excitation of the deflectors and lenses is controlled by a controller so that the ratio of G.sub.1 (Z) to G.sub.2 (-M.multidot.Z) is substantially equal to the ratio of (-M) to 1 (i.e., G.sub.1 (Z):G.sub.2 (-M.multidot.Z)=(-M):1), and the deflection trajectory of the charged-particle beam intersects with the optical axis at a crossover Z.sub.c, where M is the magnification of the lens system, G.sub.1 (Z) is the distribution of the deflective magnetic field formed on the object side of the crossover, and G.sub.2 (Z) is the distribution of the deflective magnetic field formed on the image side of the crossover.

REFERENCES:
patent: 4544846 (1985-10-01), Langner et al.
patent: 5757010 (1998-05-01), Langner
patent: 5952667 (1999-09-01), Shimizu

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