Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-08-02
2005-08-02
Lee, John R. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S310000, C250S311000, C250S3960ML
Reexamination Certificate
active
06924488
ABSTRACT:
A charged-particle beam instrument with an aberration corrector which comprises four stages of electrostatic quadrupole elements, two stages of magnetic quadrupole elements for superimposing a magnetic potential distribution analogous to the electric potential distribution created by the two central quadrupole elements of the four stages of electrostatic quadrupole elements on this electric potential distribution, and four stages of electrostatic octopole elements for superimposing an electric octopole potential on the electric potential distribution created by the four stages of electrostatic quadrupole elements.
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Hosokawa Fumio
Matsuya Miyuki
Gurzo Paul M.
JEOL Ltd.
Lee John R.
The Webb Law Firm
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