Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-08-16
2005-08-16
Nguyen, Kiet T. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S398000
Reexamination Certificate
active
06930312
ABSTRACT:
An aberration correction method and charged-particle beam instrument with four stages of multipole units. The two central stages of multipole units function as two stages of magnetic quadrupole components for superimposing a magnetic potential distribution analogous with an applied electric potential distribution on this electric potential distribution. The instrument further includes an objective lens, an objective aperture mounted in the optical path for a beam of charged particles, an operation portion for varying the accelerating voltage or the working distance between the objective lens and a specimen, and a control portion for controlling the multipole units according to an operation of the operation portion. When the accelerating voltage or working distance is varied, the resultant magnification of the four stages of multipole units and objective lens mounted behind the units is adjusted to maintain constant at least one of octupole component-activating potentials for correcting third-order aperture aberrations.
REFERENCES:
patent: 6723997 (2004-04-01), Matsuya et al.
Von H. Rose, “Abbildungseigenschaften sphärisch korrigierter elektronenoptischer Achromate” (Properties of Spherically Corrected Achromatic Electron-Lenses),Optic 33, Heft 1, 1971, pp. 1-24.
M. Haider, W. Bernhardt, and H. Rose, “Design and test of an electric and magnetic dodecapole lens”,Optic 63, No. 1, 1982, pp. 9-23.
J. Zach, “Design of a high-resolution low-voltage scanning electron microscope”,Optic 83, No. 1, 1989, pp. 30-40.
Joachim Zach, Maximilian Haider, “Aberration correction in a low voltage SEM by a multipole corrector”,Nuclear instruments and Methods in Physics Research, A 363, 1995, pp. 316-325.
Matsuya Miyuki
Uno Shinobu
JEOL Ltd.
Nguyen Kiet T.
The Webb Law Firm
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