Multi-axis compound lens, beam system making use of the...

Multi-axis magnetic lens

Multi-charged beam lens and charged beam exposure apparatus...

Multi-charged beam lens, charged-particle beam exposure...

Multi-element deflection aberration correction for electron...

Multi-gap magnetic imaging lens for charged particle beams

Multi-grid ion beam source for generating a highly...

Multiple channel electron beam optical column lithography system

Multiple electrode lens arrangement and a method for...

Multiple electron lens

Multiple lens assembly and charged particle beam device...

Multiple sextupole system for the correction of third and higher

Multipole electrostatic e-beam deflector

Multipole element

Multipole field-producing apparatus in charged-particle...

Multipole lens, charged-particle beam instrument fitted with...

Non-axisymmetric charged-particle beam system

Non-axisymmetric charged-particle beam system

Non-linear field reflectron

Objective lens